We have extensive experience in Direct Ion Beam
Deposition systems. This equipment is mainly used
in applications requiring high performance, thin
diamond-like carbon coatings, particularly in
R&D, the data storage industry, the ophthalmic
coatings industry and the tool coating
industry.
Direct ion beam deposition (DIBD)
uses a broad beam ion source to direct an
energetic, chemically active vapor flux for
deposition on a substrate (typically mounted to a
rotating fixture). The ion sources employed are
both “gridded” ion sources of the Kaufman type and
“gridless” ion sources of the end-Hall type.
Typically, the ion beam is neutralized with an
independent electron source, and the desired film
is either DLC (with a hydrocarbon precursor) or
SiO2 (with a siloxane precursor).
The goal
is to carefully control the physical and optical
properties on the films. DIBD allows fine control
of these properties by permitting large
adjustability in the incident plume chemistry and
energy, which fundamentally impacts the structure
and properties of the growing film.