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DESIGN
AND PROTOTYPING
We have a
cutting-edge manufacturing and testing facility, a
large design library, and a wide range of
professional expertise to design and build custom equipment and vacuum
assemblies. Our supporting business and
engineering systems allow us to deliver results
tailored to your needs.
Custom
Equipment and Vacuum
Assemblies
Working closely
with our clients, we design and build custom
vacuum systems and subsystems to meet their
specific requirements. We guarantee the
performance of all our custom hardware, software
products and provide long-term customer
support.
Complete
Systems
- First of kind, advanced
processing systems
- Professionally engineered
solutions that take laboratory prototypes to
production-level equipment
- Novel vacuum, plasma and thin
film applications
- Deposition or etching systems
- Sputtering, ion beam, electron
beam, plasma
Custom Subsystems
and Components
- Ion source , Magnetron and E-beam
assemblies
- Wafer handling assemblies:
cluster, robotic, manual
- Wafer/substrate fixtures:
rotating, heating, cooling, magnetic, biased,
shutters, shapers
Load locks: manual or
automatic
- Target assemblies: Ion beam,
magnetron
- Gas manifolds: mass flow
controllers, valving, purging
- Pump manifolds: pumping, valving,
piping
- Process monitoring: optical
monitoring systems, RGA’s, SIMS systems, optical
emission systems, plasma probes
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