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DESIGN
AND PROTOTYPING We have a
cutting-edge manufacturing and testing facility, a large design library, and a wide range
of professional expertise to design and build custom equipment and vacuum assemblies. Our supporting
business and engineering systems allow us to deliver results tailored to your needs.
Custom Equipment and Vacuum Assemblies
Working closely with our clients, we design and
build custom vacuum systems and subsystems to meet their specific requirements. We
guarantee the performance of all our custom hardware, software products and provide
long-term customer support.
Complete Systems
- First of
kind, advanced processing systems
- Professionally engineered
solutions that take laboratory prototypes to
production-level equipment
- Novel
vacuum, plasma and thin film applications
- Deposition
or etching systems
- Sputtering, ion beam, electron beam, plasma
Custom Subsystems and Components
- Ion source ,
Magnetron and E-beam assemblies
- Wafer
handling assemblies: cluster, robotic, manual
- Wafer/substrate fixtures: rotating, heating, cooling, magnetic, biased,
shutters, shapers
Load
locks: manual or automatic
- Target
assemblies: Ion beam, magnetron
- Gas
manifolds: mass flow controllers, valving,
purging
- Pump
manifolds: pumping, valving, piping
- Process monitoring: optical monitoring systems, RGA’s, SIMS systems,
optical emission systems, plasma probes
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