| LANS
The LANS Laboratory
Alloy and Nanolayer Sputtering system addresses
the needs of researchers in demanding,
cross-disciplinary dielectric, metallic,
magnetic, superconducting and semiconducting
thin-film development. More...
Batch Deposition
Systems
Our Batch Deposition systems
address the needs of customers seeking a
flexible, cost-effective, small footprint
workhorse for general-purpose research and
small-scale production applications using either
Biased Target or conventional Ion Beam
Deposition technologies. More... |
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Cluster Module Deposition
Systems
Our robotically loaded
deposition modules address the needs of
customers seeking flexible,
initial production applications to complete 24/7
production requirements-using either Biased
Target or conventional Ion Beam Deposition
Technologies. More...
Advanced
Optical Coating System
Our Load Locked Ion
Beam Sputtering and Biased Target Sputtering
System address the needs of customers
seeking dense
stable films with low absorption and surface
roughness. The systems are fully automated for
24/7 production. More...
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