| LANS The LANS Laboratory Alloy and Nanolayer Sputtering system
addresses the needs of researchers in demanding, cross-disciplinary dielectric, metallic,
magnetic, superconducting and semiconducting thin-film development. More...
Batch Deposition Systems
Our Batch Deposition systems
address the needs
of customers seeking a flexible, cost-effective, small footprint workhorse for general-purpose
research and small-scale production applications using either Biased Target
or conventional Ion Beam Deposition technologies. More... |
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Cluster Module
Deposition Systems Our robotically loaded
deposition modules
address the needs of customers seeking flexilble, initial production applications to
complete 24/7 production requirements-using either Biased Target or conventional Ion Beam Deposition
Technologies. More...
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