4Wave. Ion Beam Milling, Reactive Ion Milling, Plasma Etching, Dry Etch, Ion Beam Etching, Reactive Ion Etching

	CUTTING EDGE PRODUCTS
	Deposition System
	Etch System
	Specialty System
	Mini (De) Mux Chip
	4 Channel ROSA
	Optical Monitors

	ONE-STOP SERVICES
	Optical Thin Film Coatings
	Thin Film Coatings
	Design & Prototyping
	System Refurbishment
	Engineering

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	INNOVATIVE R&D
	Biased Target Deposition
	In-situ Process Monitoring
	Dynamic Process Compensation
	Ion Beam Deposition
	Ion Beam Etch
	Direct IBD
	Ion-Assisted Evaporation

ETCH SYSTEMS

We provide a variety of custom R&D and production systems for etching, surface modification of thin-films.

Research and Development Etch System

The LIBE, LISE and LIME family of ion etching systems addresses the needs of customers seeking a flexible, cost-effective, small footprint, ion-etching/processing workhorse for general-purpose research and small-scale production applications. More...

Multi-Wafer Batch Etch Systems

Our Multi-Wafer Batch Etch system is a low cost, small footprint workhorse for general-purpose research and production applications. More...

Singe Wafer Load Lock Etch Systems

Our Single Wafer Load Lock Etch system is low cost that provides our customers a small footprint workhorse for general-purpose research and production applications. More...

Load Locked Cluster Etch Module

Our Load Locked Etch Module provides our customers the flexability of a Single Wafer Load Lock or a Cassette to Cassette System. This module is designed for 24/7 production and has the flexability for general-purpose research. More...