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ENGINEERING SERVICES
MECHANICAL ENGINEERING
Our mechanical
engineers design systems ranging from small batch
tools to multi-process module cluster tools. We
also develop compact reliable fixturing to handle
wafers and manipulate targets in vacuum. Our
mechanical engineering services include:
- High vacuum chamber design
- High vacuum pumping stacks: cryo,
turbo and diffusion pumps
- Substrate fixturing: wafer spin,
adjustable incidence angle, cooling, shuttering,
planetary motion, manual and robotic loading,
all with feedback control
- Target fixturing: multi-target,
cooled, feedback controlled indexing
- Specialized
vacuum/plasma/characterization component
mounting
- High vacuum electrical, optical
and mechanical positioning feedthroughs
- Robotics: single wafer load-lock,
multi-wafer cassette and central wafer handlers
CE, SEMI S2/S8 certifiable designs
- Documentation: detailed drawings,
assembly drawings, BOMs, schematics, tool layout
drawings, Pro-E, AutoCad
- Tools: batch, cluster modules,
transfer modules, multi-module cluster tools
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