ENGINEERING SERVICES

MECHANICAL ENGINEERING

Our mechanical engineers design systems ranging from small batch tools to multi-process module cluster tools. We also develop compact reliable fixturing to handle wafers and manipulate targets in vacuum. Our mechanical engineering services include:

• High vacuum chamber design
• High vacuum pumping stacks: cryo, turbo and diffusion pumps
• Substrate fixturing: wafer spin, adjustable incidence angle, cooling, shuttering, planetary motion, manual and robotic loading, all with feedback control
• Target fixturing: multi-target, cooled, feedback controlled indexing
• Specialized vacuum/plasma/characterization component mounting
• High vacuum electrical, optical and mechanical positioning feedthroughs
• Robotics: single wafer load-lock, multi-wafer cassette and central wafer handlers
  CE, SEMI S2/S8 certifiable designs
• Documentation: detailed drawings, assembly drawings, BOMs, schematics, tool layout drawings, Pro-E, AutoCad
• Tools: batch, cluster modules, transfer modules, multi-module cluster tools