| ENGINEERING
SERVICES
MECHANICAL ENGINEERING
Our mechanical engineers design systems ranging from small
batch tools to multi-process module cluster tools. We also develop compact reliable
fixturing to handle wafers and manipulate targets in vacuum. Our mechanical engineering
services include:
- High vacuum
chamber design
- High vacuum
pumping stacks: cryo, turbo and diffusion pumps
- Substrate
fixturing: wafer spin, adjustable incidence
angle, cooling, shuttering, planetary motion,
manual and robotic loading, all with feedback
control
- Target
fixturing: multi-target, cooled, feedback
controlled indexing
- Specialized
vacuum/plasma/characterization component
mounting
- High vacuum
electrical, optical and mechanical positioning
feedthroughs
- Robotics: single wafer load-lock, multi-wafer cassette and central wafer
handlers
CE, SEMI S2/S8 certifiable
designs
- Documentation: detailed
drawings, assembly drawings, BOMs, schematics,
tool layout drawings, Pro-E, AutoCad
- Tools: batch, cluster modules, transfer modules, multi-module cluster tools
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