Product Description
The Laboratory Alloy and Nanolayer System (LANS) is 4Wave’s Flagship R&D system. This system has received wide acceptance in the academic materials research world. Equipped with multiple processing targets, it is a very versatile platform for multilayer material synthesis and compositional nanotechnology.
Markets Include:
- Optics
- Magnetic sensors
- University Research & Development
Applications:
- Materials Research and Development
Features:
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High output, low-energy plasma source
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6 x 4″ biased target carousel
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independent target biasing for alloy composition control
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100mm diameter process surface
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<3% non-uniformity over 75 mm
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substrate plasma cleaning, etching oxidation, nitridation
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Water cooled, rotating, magnetic, shuttered stage, heating up to 600 C
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Single wafer load lock stage