4waveInc. Thin Film Processing. Coatings and Device Deposition Services.

	CUTTING EDGE PRODUCTS
	Deposition System
	Etch System
	Mini (De) Mux Chip
	4 Channel ROSA
	Laser End Point Detectors
	Optical Monitors

	ONE-STOP SERVICES
	Engineering
	Design & Prototyping
	Plasma Source Refurbishment
	System Refurbishment
	Thin Film Processing

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	INNOVATIVE R&D
	Biased Target Deposition
	In-situ Process Monitoring
	Dynamic Process Compensation
	Ion Beam Deposition
	Ion Beam Etch
	Direct IBD
	Ion-Assisted Evaporation

THIN FILM PROCESSING

4Wave offers metallic, nitride and dielectric thin films using both Ion Beam and Biased Target deposition techniques. 4Wave can provide custom optical interference filters coatings over the spectral range of 200nm to 2000nm for the use in a variety of applications.

Process Equipment :

Load Lock Ion Beam Deposition System up to 150mm wafers (Metal or Dielectric Films)
Load Locked Biased Target Deposition System up to 200mm wafers. (Dielectric Films, Optical filters)
Batch Biased Target Deposition System up to 100mm wafers. (Dielectric, metal, co-deposition of up to 3 targets mixed with oxygen)

Metrology Equpment:

PerkinElmer Lanbda 950 UV/VIS Spectrometer (Transmition and Reflection)

Tencor P12 Profilometer and Stress Measurement

Sentech SE850 UV/VIS Mapping Elipsometer

Prometrix Resistivity Mapper

Macbeth TD929 Densitometer

Olympus BX60M Microscope with Digital Camera

Agilent 86100A Wide Bandwidth Osciloscope with 86105A 1000nm-1600nm

Agilent 86130A Error Perfromance Analyser

Agilent 86142B Optical Spectrum Analyser

Agilent 8164B Lighwave Measurement System with

81633A Power Sensor
81600B Tunable Laser

Nettest Tunable Lasers (1300nm +/-50nm and 1550nm +/-50nm)

Blanket Films:

High Purity Metalic Films:
- Ag, Ta, NiFe, Cr, Cu, Co, FeMn, V, Hf, Gd, Sc, C, Zn, Sn, Mn, TiN, TaN, Ti
Dielectric films by reactive sputtering: fully dense, amorphous, stable materials:
- SiO2, TiO2, Ta2O5, Al2O3, HfO2, V2O5, VO2, AgO, MgO, AlN
Various Sheet Rhos:
- TaNx, VOx, TiNx
Optical Filters:

CWDM Filter

Near UV Long Pass Filter

Near UV Short Pass Filter

Custom Filter