Our mechanical engineers design systems ranging from small batch tools to multi-process module cluster tools. We also develop compact reliable fixturing to handle wafers and manipulate targets in vacuum.
Our mechanical engineering services include:
- High vacuum chamber design
- High vacuum pumping stacks: cryo, turbo and diffusion pumps
- Substrate fixturing: wafer spin, adjustable incidence angle, cooling, shuttering, planetary motion, manual and robotic loading, all with feedback control
- Target fixturing: multi-target, cooled, feedback controlled indexing
- Specialized vacuum/plasma/characterization component mounting
- High vacuum electrical, optical and mechanical positioning feedthroughs
- Robotics: single wafer load-lock, multi-wafer cassette and central wafer handlers
CE, SEMI S2/S8 certifiable designs - Documentation: detailed drawings, assembly drawings, BOMs, schematics, tool layout drawings, Pro-E, AutoCad
- Tools: batch, cluster modules, transfer modules, multi-module cluster tools