Modular Linear Ion Source
Abstract- The modular linear ion source described herein uses cylindrical end-Hall modules in a linear array. The modules are operated in parallel so that there is a single gas flow to the ion source, a single discharge power supply, and a single hollow-cathode electron source, similar to a non-modular design. The spacing between the modules can be varied to obtain a wide range of operating characteristics while keeping a high degree of ion-dose uniformity along the length. The ion beam is fully neutralized to provide stable operation that is not dependent on workpiece material.