1400Q312 LL Etch_edit

Product Description

The 4Wave Model IBE14L01-FA system is a flagship product
addressing several significant markets. This system boasts high
performance etching, critical thin film profile milling, glancing
angle milling, etc. It addresses the needs of customers seeking a
flexible, high throughput, cost-effective, Failure Analysis and Yield
Improvement processing. The system is capable of single chip or
multiple chip configuration. This model is already serving the leading
global Semiconductor companies.


  • Semiconductor Failure Analysis (PFA)
  • Yield Improvement
  • Anti-Counterfeit and Supply Chain Security
  • Semiconductor Chip Quality Assurance
  • Process Control and Chip Design Assessment
  • Chip Reverse Engineering
  • Semi-Conductor
  • Data Storage
  • MEMS
  • Wafer processing services
  • Delayering (Failure Analysis)
  • Patterned Etch


  • Integrated Secondary Ionization Mass Spectrometer (SIMS)
  • Advanced Ion Beam Source
  • Custom Ion Optics and Beam Shaping
  • Advanced Semiconductor Layer Stop Technology (SLST)
  • Automatic Layer Termination Software
  • Fully Automatic Sample Transfer With Load Lock

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